Abstract: Supported by the data of China provincial governments、enterprises and financial institutions investment on science and technology innovation from 2005-2015, the indicator system of regional S&T investment of S&T innovation performance has been established. Further analysis the influence of S&T investment on S&T innovation by using data envelopment analysis (DEA) for empirical research, and evaluate the performance of regional S&T investment of S&T innovation from the provincial and the East central and western regions, and many other angles in our country. The empirical results show that the comprehensive efficiency of the financial investment of science and technology innovation showed a trend of steadily rising average year; Province, regional innovation performance results output gap is larger, the eastern region is superior to other area; This study analyzed the correlation between regional investment of science and technology financial on innovation performance and the level of regional economic development , and further analyses the reason for the difference between the regional financial investment of science and technology innovation performance, and relevant policy implications are put forward based on the results of the study.